Atom Probe Tomography Analysis of Bulk Chemistry in Mineral Standards

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

Multivariate statistical analysis of atom probe tomography data.

The application of spectrum imaging multivariate statistical analysis methods, specifically principal component analysis (PCA), to atom probe tomography (APT) data has been investigated. The mathematical method of analysis is described and the results for two example datasets are analyzed and presented. The first dataset is from the analysis of a PM 2000 Fe-Cr-Al-Ti steel containing two differe...

Multivariate Statistical Analysis of Atom Probe Tomography Data

Multivariate statistical analysis (MVSA) methods have been shown to yield many advantages in analytical instrumentation techniques because they offer an objective means to find complex information correlations in data that are not obvious to an observer and they maximize the discrimination of low-level signals from noise. Because they are objective in nature, the methods hold promise for automa...

Advanced Nanostructural Analysis of Aluminium Alloys Using Atom Probe Tomography

This paper sets out the needs for and recent advances in microscopy in Al alloys, using solutesolute and solute-vacancy clustering as examples. Cluster-assisted nucleation and cluster strengthening are discussed and this is followed by a discussion of the local electrode atom probe. Heuristic and algorithmic tools for assessing the nanoscale microstructure or nanostructure of Al alloys acquired...

Toward atom probe tomography of microelectronic devices